Suchoruchenkov K, Maraeva E, Alexandrova O. Virtual Device for Calculating Parameters of Epitaxial Layers in the Cultivation of Heterostructures. CTE [Internet]. 2023Mar.28 [cited 2024May15];(1):96-105. Available from: http://cte.eltech.ru/ojs/index.php/kio/article/view/1765